Growth kinetics and origin of residual stress of two-phase crystalline–amorphous nanostructured films

Composition-driven amorphous-to-crystalline transition is widely observed in sputter-deposited thin films. We have recently shown that peculiar two-phase crystalline–amorphous nanostructures can be obtained for compositions the zone between single-phased amorphous and crystalline films, offering a new possibility to control surface topography related functional properties. Here, growth kinetics of formed explored residual stress measurements. From analysis top-view scanning electron microscopy images, evolution with film thickness relevant parameters describing process was extracted, i.e., coverage, volume fraction, perimeter per unit area regions growing competition ones. demonstrate, supported aforementioned parameters, governed by nucleation, growth, interaction during competitive process. Our results shed light on phenomenon demonstrate relevance measurements exploring mechanisms complex microstructures.